METHOD FOR MANUFACTURING LAMINATED THIN-FILM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laminated thin-film device having high quality and high reliability with stable deposition without being affected by a thermal catalyst medium or by reducing the influence thereof. SOLUTION: In the method for manufacturing the laminated thin-film device (an electrophotographic photoreceptor) by successively laminating at least two layers by a hot wire CVD (Chemical Vapor Deposition) process on a substrate 29 to be deposited with films, the component of heating element used for the deposition of the thin films afterward is made different from that used for the deposition of the previous thin films. COPYRIGHT: (C)2004,JPO