Systems and methods for digitally controlling sensors, one embodiment being a digital controller for a capacitance diaphragm gauge which is embedded in a digital signal processor (DSP). The digital controller receives digitized input from a sensor AFE (30) via a variable gain module, a zero offset module and an analog-to-digital converter. The controller automatically calibrates the received input by adjusting the variable gain and zero offset modules.
申请公布号
WO03102527(A3)
申请公布日期
2004.03.18
申请号
WO2003US16911
申请日期
2003.05.29
申请人
MYKROLIS CORPORATION;ALBERT, DAVID, M.;ARRANT, EDWIN, K.;EDWARDS, MARVIN, B.
发明人
ALBERT, DAVID, M.;ARRANT, EDWIN, K.;EDWARDS, MARVIN, B.