发明名称 DIGITALLY CONTROLLED SENSOR SYSTEM
摘要 Systems and methods for digitally controlling sensors, one embodiment being a digital controller for a capacitance diaphragm gauge which is embedded in a digital signal processor (DSP). The digital controller receives digitized input from a sensor AFE (30) via a variable gain module, a zero offset module and an analog-to-digital converter. The controller automatically calibrates the received input by adjusting the variable gain and zero offset modules.
申请公布号 WO03102527(A3) 申请公布日期 2004.03.18
申请号 WO2003US16911 申请日期 2003.05.29
申请人 MYKROLIS CORPORATION;ALBERT, DAVID, M.;ARRANT, EDWIN, K.;EDWARDS, MARVIN, B. 发明人 ALBERT, DAVID, M.;ARRANT, EDWIN, K.;EDWARDS, MARVIN, B.
分类号 G01L9/00;G01D3/02;G01D18/00;G01L9/12;G01L19/02;G01L19/04;G01L27/00 主分类号 G01L9/00
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