| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical analysis apparatus easily miniaturized although the chemical analysis apparatus has a complicated flow path, allowing accurate flow rate control of a liquid, obtaining data of high reliability, eliminating deterioration of the liquid, and having versatility applicable to a reagent etc., comprising only the liquid and superior operability. SOLUTION: The chemical analysis apparatus is provided with a liquid transportation mechanism 1, having a flow path substrate 2 formed from the liquid flow path 2d for coupling liquid supply ports 2a, 2b and a discharge port 2c and having a rectangular, V-shaped or U-shaped cross-sectional opening on one side, a covering substrate 3 for covering an open liquid flow path side of the flow path substrate 2 and thin-film piezoelectric vibrators 4, 5 disposed and having a flow path gap on the covering substrate 3 facing the liquid flow path 2d. COPYRIGHT: (C)2004,JPO |
