PASTE COATING DEVICE AND PATTERN MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To measure the depth of a plurality of patterns 25a with a single scanning and fill the equal amount of paste in each pattern 25a of a substrate 25 having a matrix pattern consisting of vertically and horizontally formed patterns 25a surrounded by barrier ribs by a paste coating machine. SOLUTION: Even for a matrix pattern which is hard to measure the bottom of its patterns 25a by using a point light source, the bottom data can be obtained for the patterns 25a by measuring by using a scanning line 11 obliquely crossing the vertically and horizontally arrayed patterns. Thus the reliable data can be obtained from those data. And the equal amount of paste is applied to the patterns 25a maintaining a constant distance between the dispenser and the substrate by feeding back those data. COPYRIGHT: (C)2004,JPO