| 摘要 |
There is provided a semiconductor device having a storage node free of defect in geometry and capable of preventing a cylinder from collapsing, protecting an interface with an SC's polycrystalline silicon barrier metal against oxidation, and furthermore reducing current leakage. The device includes a storage node contact insulation film disposed on a semiconductor substrate and provided with a storage node, a storage node insulation film and the storage node penetrating the storage node insulation film and positioned to extend from the storage node insulation film upward, and a storage node contact is recessed toward a bottom of the storage node and the storage node's bottom has a protruding geometry embedded in the recess.
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