| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the activity when a perfluorocompound such as CF<SB>4</SB>and C<SB>2</SB>F<SB>6</SB>containing only fluorine as halogen is decomposed at low temperature. <P>SOLUTION: The fluorine in the perfluorocompound containing only fluorine as halogen is converted into hydrogen fluoride by bringing the perfluorocompound into contact with a catalyst containing Al, Ni and W as active components, the multiple oxide of Ni and Al and that of W and Ni at 500-800°C in the presence of steam or steam and oxygen. By using this catalyst, the low-temperature decomposition activity can be enhanced, namely, the perfluorocompound can be decomposed at a low temperature at a high decomposition rate. <P>COPYRIGHT: (C)2004,JPO |
