MASKLESS ALIGNER

摘要

PROBLEM TO BE SOLVED: To provide a maskless aligner of which exposure time is shortened by reducing light absorption at a liquid-crystal reticle. SOLUTION: A transmission type liquid crystal 6 comprising a polarizing plate 7 only on an emission side is used as a liquid-crystal reticle 5 capable of generating an arbitrary transmission pattern, and a polarizing light source is used as an exposure light source 1. COPYRIGHT: (C)2004,JPO