发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS INSPECTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit device in which a high speed operation IP core mounted on a system LSI can be inspected at the actual operating speed with high precision in the wafer level, and to provide its inspecting method. SOLUTION: A circuit 101 is inspected by connecting a probe, connected with a test means 105, with the inspection I/O pads of a plurality of semiconductor integrated circuit devices 100 having I/O pads 103 and inspection I/O pads 102 provided in the vicinity of the circuit 101 to be inspected. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004087527(A) 申请公布日期 2004.03.18
申请号 JP20020242420 申请日期 2002.08.22
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 IIDA TAKESHI
分类号 G01R1/073;H01L21/66;(IPC1-7):H01L21/66 主分类号 G01R1/073
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