SAMPLE HOLDER FOR CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a sample holder capable of working and observing a sample from a plurality of directions. SOLUTION: The charged particle beam device has a mechanism capable of orienting a sample stand arranged to the sample holder in an optional direction, and a fine adjustment device. By this constution, work by the use of an ion beam, a secondary electron image and the observation of an electron microscope from the optional direction become possible without taking out the minute piece of the sample from the sample stand. COPYRIGHT: (C)2004,JPO