| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface observation device capable of detecting and correcting eccentricity generated in an optical system by a change in the observation magnification. SOLUTION: This surface observation device has an observing optical means 3 for observing the surface of an observed object 1 by changing the observation magnification, and a placing means 2 horizontally movable while placing the observed object 1. The surface observation device observing a requested portion on the surface of the observed object 1 by horizontally moving the placing means 2, has a reference mark 13 for detecting eccentricity, in a position independent of the placing means 2. The placing means 2 is further movable into a position not to intercept light from the reference mark 13, to detect the eccentricity of the observing optical means 3 generated when changing the observation magnification. COPYRIGHT: (C)2004,JPO
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