| 摘要 |
PROBLEM TO BE SOLVED: To provide a flat ceramic heater with excellent durability uniformly heating an object to be heated, capable of obtaining stable heating and heat radiation at all times, and a manufacturing method of the same. SOLUTION: The flat ceramic heater comprises ceramic base materials 5, 8 of which the main surface is a heat radiation surface, resistance heating elements 6, 9 flatly laid and embedded in the ceramic base materials 5, 8, and power supplying terminals 7, 10 of which one-side ends are connected to the resistance heating elements 6, 9, and other-side ends are led out to other main surface sides of the ceramic base materials 5, 8. The resistance heating elements 6, 9 and the power supplying terminals 7, 10 are splittedly arranged at a center area 4 and a peripheral area 8, and the resistance heating elements 9 arranged to the peripheral area is formed into a multi-step, and the diameter thereof is formed so as to become larger toward the heat radiation surface side. COPYRIGHT: (C)2004,JPO
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