ETCHING DEVICE, ETCHING METHOD, AND METHOD OF CLEANING ETCHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an etching device and a method, which are capable of simplifying a process of cleaning a plate member.

SOLUTION: In the etching method, the plate member 9 with a large number of openings 10 is arranged on a surface side of a board 2, and the surface of the board is roughed by etching. Both the front and rear surface of the plate member 9 are used and alternately cleaned at the same time when the board 2 is etched.

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