METHOD OF ACQUIRING PROCESS RESULT INTEGRATED PRIOR TO PROCESS TOOL TO BE PLACED

摘要

PROBLEM TO BE SOLVED: To confirm and guarantee a process result integrated prior to the placement of a process tool as a change or a part of renewal of a semiconductor manufacturing factory.

SOLUTION: A complete semiconductor manufacturing supplemental matter of a process tool is subdivided into a short loop or a submodule. Later, they are combined into a complete loop. The combination of a submodule to a module which approaches a complete supplemental matter of the process tool is carried out in a mild method, and one or a plurality of subloops are first combined and evaluated. One or a plurality of additional subgroups are added to this combination, and each of these subgroups at the end is also formed by combining one or a plurality of (original) subgroups. This process is continued until the complete supplemental matter of a process device is formed and the complete process loop of a semiconductor device manufacturing factory is completed.

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