摘要 |
PROBLEM TO BE SOLVED: To provide a ferromagnetic supermagnetostriction film which is made thin while securing a high magnetostriction constant. SOLUTION: The ferromagnetic supermagnetostriction film is provided with a substrate, a base film layer formed on the substrate, and a magnetic film layer formed on the base film layer. The base film layer is composed of one or more kinds selected from Ta and Ti. The magnetic film layer consists of an Ni-Mn-Ga based alloy comprising, by atom, 47 to 56% Ni and 20 to 28% Mn, and the balance Ga with inevitable impurities. COPYRIGHT: (C)2004,JPO
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