OPTICAL WAVEGUIDE DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To couple an input/output part in an optical waveguide with an optical fiber while reducing loss and suppressing return reflection in an optical device for which the optical waveguide is formed on the substrate of glass or the like by using a photolithography technique. SOLUTION: A grinding monitor 30 capable of optical or electrical quantitative observation is disposed at a grinding target position x to be the entry and exit light end face of the optical waveguide 20. COPYRIGHT: (C)2004,JPO