MAGNESIUM OXIDE VAPOR DEPOSITION MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a magnesium oxide vapor deposition material from which magnesium oxide vapor can easily be produced. SOLUTION: The material consists of sintered polycrystalline compact pellets having magnesium oxide purity higher than 99.98mass% and relative humidity of≥90%. The magnesium oxide vapor deposition material for depositing the magnesium oxide by an electronic beam vapor deposition process is obtained by forming a number of projections having rounded front ends on the surfaces of the sintered compact pellets. COPYRIGHT: (C)2004,JPO