| 发明名称 |
Substrate processing method and method for manufacturing probe carrier |
| 摘要 |
The invention provides a method for drying a probe immobilizing surface for preventing components of a probe solution used for immobilizing the probes from being left behind when the probe immobilizing surface of the substrate is dried.
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| 申请公布号 |
US2004053305(A1) |
申请公布日期 |
2004.03.18 |
| 申请号 |
US20030459498 |
申请日期 |
2003.06.12 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SUZUKI TOMOHIRO |
| 分类号 |
G01N33/53;B01J19/00;B01L3/00;B05D3/00;C12M1/00;C12M1/34;C12N15/09;C12Q1/68;G01N37/00;(IPC1-7):C12Q1/68 |
主分类号 |
G01N33/53 |
| 代理机构 |
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