发明名称 |
Device and method for alignment of optical axis |
摘要 |
An optical axis alignment apparatus 10 has a chuck 13 for holding an optical member 14, a chuck 16 for holding an optical member 15, a pushing mechanism, which pushes the chuck 1 to generate a predetermined frictional force between the optical member 14 and the optical member 15, and actuators 18A to 18D. The actuators 18A to 18D have a piezoelectric element 51b which generates an impulsive inertial force by abrupt extension and contraction. |
申请公布号 |
US2004052469(A1) |
申请公布日期 |
2004.03.18 |
申请号 |
US20030470518 |
申请日期 |
2003.07.29 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY CORPORATION;NANO CONTROL CO., LTD |
发明人 |
MUNEKATA MUTSUO;HIGUCHI TOSHIRO |
分类号 |
G02B6/255;G02B6/36;G02B6/38;G02B6/42;G02B7/00;H02N2/00;(IPC1-7):G02B6/26 |
主分类号 |
G02B6/255 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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