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发明名称
STI PROCESS FOR DRAM
摘要
申请公布号
EP1397834(A2)
申请公布日期
2004.03.17
申请号
EP20020744557
申请日期
2002.06.21
申请人
INFINEON TECHNOLOGIES AG
发明人
POHL, JOHN;CHAUDHARY, NIRMAL;KLEE, VEIT;MONO, TOBIAS;SCHROEDER, PAUL
分类号
H01L21/762;H01L21/8242;(IPC1-7):H01L21/824;H01L27/108
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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