Shock absorbing apparatus and use thereof in a positioning apparatus

摘要

The shock absorbing device (300) includes a shock absorber provided at the stroke end of a stage apparatus (100). The shock absorber is fixed to a mounting plate which is provided separately from the stage apparatus. The stage apparatus is mounted to a main body apparatus, and arranged in a region formed in a vacuum chamber under a condition of vacuum of purged ambience. An independent claim is also included for a positioning apparatus.