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发明名称
COMPONENT HEATER SYSTEM FOR USE IN MANUFACTURING PROCESS
摘要
申请公布号
EP1118051(B1)
申请公布日期
2004.03.17
申请号
EP19990945336
申请日期
1999.09.03
申请人
MYKROLIS CORPORATION
发明人
MOON, ROGER, A.
分类号
H01L21/00;H01L21/205;G05D23/00;G05D23/19;(IPC1-7):G05D23/19
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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