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发明名称
APPARATUS AND METHOD FOR MEASURING ASPHERICAL OPTICAL SURFACES AND WAVEFRONTS
摘要
申请公布号
EP1397638(A2)
申请公布日期
2004.03.17
申请号
EP20020739650
申请日期
2002.05.29
申请人
ZYGO CORPORATION
发明人
ZANONI, CARL, A.
分类号
G01B9/02;G01B11/24;G01B11/255;G01J9/02;G01M11/00;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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