METHOD AND DEVICE FOR TESTING OR CALIBRATING A PRESSURE SENSOR ON A WAFER,申请号EP20020730292-传众专利搜索

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发明名称	METHOD AND DEVICE FOR TESTING OR CALIBRATING A PRESSURE SENSOR ON A WAFER
摘要
申请公布号	EP1397656(A1)	申请公布日期	2004.03.17
申请号	EP20020730292	申请日期	2002.06.10
申请人	FRAUNHOFER-GESELLSCHAFT ZURFOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	KOESTER, OLIVER;SLOTKOWSKI, JOHANN
分类号	G01L27/00;(IPC1-7):G01L27/00	主分类号	G01L27/00
代理机构		代理人
主权项
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