CLAMP FOR CONNECTING VACUUM EXHAUST LINE OF SEMICONDUCTOR EQUIPMENT

摘要

PURPOSE: A clamp for connecting a vacuum exhaust line of semiconductor equipment is provided to perform a connection process by one operator by fixing and centering a connection part between connection pipes and by coupling the connection pipes to each other. CONSTITUTION: One end of a pair of semicircular bands(11,11') is coupled to a pair of clamp bodies(10,10') by a hinge unit(14) so as to rotate. A fixing bolt(15) and a coupling groove to which the fixing bolt is fixed are installed in the other end of each semicircular band. A plurality of interval control bolts(13) connect the respective clamp bodies in such a way that the clamp bodies are in parallel with each other and separated from each other by a predetermined interval.