发明名称 |
Werkwijze voor het meten van contourvariaties. |
摘要 |
A method for measuring a contour variation of a measuring area on an object. The method includes the steps of: irradiating the measuring area with a light beam, wherein reflection or transmission of the beam occurs; splitting the transmitted or reflected beam; combining the split beams with each other and observing a fringe pattern representing a differential phase between the split beams; varying the phase of the split beams relative to each other, such that the differential phase is kept within the range of 2 pi; calculating an optical path length difference from the differential phase; and relating the optical path length difference to the contour variation of the object. |
申请公布号 |
NL1021457(C2) |
申请公布日期 |
2004.03.16 |
申请号 |
NL20021021457 |
申请日期 |
2002.09.13 |
申请人 |
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO |
发明人 |
IAN SAUNDERS;HEDSER VAN BRUG;JACOBUS JOHANNES KORPERSHOEK |
分类号 |
G01B9/02;G01B11/24 |
主分类号 |
G01B9/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|