| 摘要 |
PURPOSE: A susceptor is provided to prevent a terminal and a power line even if a gap exists in a coupling of a susceptor body and a susceptor support pipe by using a protection tube for receiving the terminal such that the protection tube is mounted on the inside of the susceptor support pipe. CONSTITUTION: The susceptor(130) is attached to a reaction chamber in which a reaction region for processing a wafer(1) is defined. The wafer is placed on a plate-type susceptor body(130a) that supports and heats the wafer. The plate-type susceptor body is horizontally disposed in the reaction region while a heater(132) is mounted on the susceptor body. One end of a pipe-type susceptor support unit(130b) is coupled to the back surface of the susceptor body and the other end of the susceptor support unit is exposed to the outside of the chamber. A susceptor lead(130c) closes the other end of the susceptor support unit. At least two terminals(182,184) penetrate through the back surface of the susceptor body to the inside of the susceptor support unit so as to be electrically connected to the heater. A pipe-type protection tube(202) has the closed end and one end coupled to the back surface of the susceptor body such that the one end is located in the susceptor support unit to receive the terminal. A plurality of connection terminals(186,188) are connected to an outer power supply apparatus. The power lines(190a,190b) connect the terminals with the connection terminals, respectively.
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