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发明名称
摘要
申请公布号
JP3507271(B2)
申请公布日期
2004.03.15
申请号
JP19970046485
申请日期
1997.02.28
申请人
发明人
分类号
H01L21/28;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/28
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