METHOD FOR MANUFACTURING V-GROOVE BLOCK FOR USE IN OPTICAL FIBER ARRAY

摘要

PURPOSE: A method for manufacturing a V-groove block for use in an optical fiber array is provided to improve the yield of the products by accurately connecting the optical fiber to the V-groove block. CONSTITUTION: A method for manufacturing a V-groove block for use in an optical fiber array includes the steps of: forming an upper and a lower mask layers on the top and a bottom surfaces of a cleaned silicon wafer(50) and coating a first photoresist layer on the top mask layer; illuminating an ultraviolet ray on the first upper mask layer by using a photo mask and developing the first photoresist layer, thereby forming a photoresist pattern; forming a V-groove etching mask on the upper mask layer and removing the photoresist pattern; forming a V-groove(50a) on the top surface of the silicon wafer(50) by using an anisotropic etching method; removing the upper and the lower mask layer remaining on the silicon wafer(50a); coating(S180) a second photoresist layer(57) on the top surface of the silicon wafer(50) formed thereon the V-groove(50a); manufacturing(S190) the V-groove block(60) by cutting the silicon wafer(50) formed thereon the V-groove(50a) into a plurality of chips; and removing(S200) the second photoresist layer(57) remaining on the top surface of the V-groove block(60).