| 发明名称 |
Low expansion unit for use as heat diffuser in semiconductor equipment includes an iron plate element, and a layer of iron/nickel |
| 摘要 |
<p>A low expansion unit (8) includes a plate element (9) and a layer of iron/nickel (10). The plate element is made of an iron-series material and has a surface layer. The layer of iron/nickel is formed on and/or in the surface layer. Independent claims are also included for: (a) a method for the fabrication of the low expansion unit; (b) a semiconductor apparatus including the low expansion unit.</p> |
| 申请公布号 |
FR2844397(A1) |
申请公布日期 |
2004.03.12 |
| 申请号 |
FR20030010539 |
申请日期 |
2003.09.05 |
| 申请人 |
KABUSHIKI KAISHA TOYOTA JIDOSHOKKI |
发明人 |
YOSHIDA TAKASHI;KINOSHITA KYOICHI;TANAKA KATSUFUMI;SUGIYAMA TOMOHEI;KUDO HIDEHIRO;KONO EIJI |
| 分类号 |
H01L23/373;(IPC1-7):H01L23/373 |
主分类号 |
H01L23/373 |
| 代理机构 |
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代理人 |
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