| 摘要 |
PROBLEM TO BE SOLVED: To provide a lens barrel supporting device which is capable of stably supporting a lens barrel without having an adverse effect on the optical performance of a projection optical system even when the ambient temperature varies, and to provide an exposure system. SOLUTION: The lens barrel supporting device S supporting a lens barrel PK provided with a flange 10 is equipped with a supporting pad 12 provided with a mounting surface confronting the under surface of the flange 10, three projections 60 which are provided at three positions between the under surface of the flange 10 and the mounting surface of the supporting pad 12 respectively to support the flange 10, and a plurality of anchor rods 70 which are provided at a plurality of points on the peripheral edge 15 of the flange 10 and whose one ends 71 are joined to tabs 16 provided to the peripheral edge 15 and other ends 72 are joined to the supporting pad 12. COPYRIGHT: (C)2004,JPO
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