| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum valve adequate to frequent open/close. SOLUTION: The vacuum valve comprises an insulating container 1, both opening portions of which are sealed with a fixed side sealing fitting and a movable side sealing fitting 3, respectively; a fixed side conductive shaft which passes/fixes through/to the fixed side sealing fitting and is fitted to a fixed electrode; a movable side conductive shaft 7 which passes through the opening portion of the movable side sealing fitting 3, faces the fixed electrode, mounts a movable electrode, and is movable so as to make contact with/distance from the fixed electrode; and a bellows 8 which is located between the movable electrode and the movable side sealing fitting 3 and is made of an alloy material containing Ni of 50% or more, where a non-oxidative film 12 is formed on at least a brazed surface portion 13 on a free end 8b of the bellows of brazed portions which hermetically fix between one end of the bellows 8 and the movable side conductive shaft 7 and between the free end 8b of the bellows 8 and the movable sealing fitting 3 respectively. COPYRIGHT: (C)2004,JPO
|
