| 摘要 |
PROBLEM TO BE SOLVED: To provide an easily manufacturable energy filter of S-type. SOLUTION: The energy filter has the first to fourth magnetic field regions F1-F4 in such an arrangement that the distribution of the magnetic field and the locus of an electron beam are counter-symmetrical about the middle point M between the second F2 and third magnetic field regions F3, wherein the first M1 and third magnetic poles M3 to produce the first F1 and third magnetic field regions F3 have a common ampere turn C1 while the second M2 and fourth magnetic poles M4 to produce the second F2 and fourth magnetic field regions F4 have a common ampere turn C2. COPYRIGHT: (C)2004,JPO
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