TEMPERATURE CONTROL METHOD FOR ELECTRIC FURNACE, AND ELECTRIC FURNACE

摘要

PROBLEM TO BE SOLVED: To carry out a temperature setting for more accurately controlling the temperature of a furnace chamber without disturbing the temperature of the furnace chamber by disturbance or the like without carrying out the input of a complex parameter in an electric furnace for baking electronic parts. SOLUTION: The electric furnace has a structure that upper and lower heater chambers and the furnace chamber are perfectly partitioned by a heat-resistant member, heaters in the upper and lower heater chambers independently carries out a temperature control respectively and the temperature in the furnace chamber is adjusted. A controlling thermocouple is provided in the upper and lower heater chambers and the furnace chamber respectively. A control circuit inputted with the temperature of the upper heater chamber, the furnace chamber and the lower heater chamber and controlling the heaters in the upper and lower heater chambers is provided. The heaters in the upper and lower heater chambers are controlled by the control circuit making the set temperature in the furnace chamber as a reference to control the temperature in the furnace chamber. COPYRIGHT: (C)2004,JPO