| 摘要 |
PROBLEM TO BE SOLVED: To widen an effective area used as a pattern-forming region of a substrate, further to hold the substrate while easily centralizing it, and to easily and surely take out the substrate. SOLUTION: In a substrate holder for releasably holding the substrate W by putting the substrate W between a fixed holding member 54 and a movable holding member 58 provided with a sealing member 60, pushing the movable hold member 58 toward the fixed hold member 54, and sealing a region surrounding the peripheral edge of the substrate W with the sealing member 60, this substrate holder has electrical contacts 92 of a flat spring form, which are electrically connected to an electric conductor 88 in the region sealed by the sealing member 60 and pass an electric current to the substrate W, when the fixed hold member 54 holds the electric conductor 88, and the movable hold member 58 holds the substrate W with itself and the fixed holding member 54. COPYRIGHT: (C)2004,JPO
|
