发明名称 Composite dielectric layers
摘要 An apparatus including a contact point formed on a device layer of a circuit substrate or interconnect layer on a substrate; a first dielectric layer including cubic boron nitride on the substrate; and a different second dielectric layer on the substrate and separated from the device layer by the first dielectric layer. Also, an apparatus including a circuit substrate including a device layer and a composite dielectric layer. The composite dielectric includes a first dielectric material including cubic boron nitride and a different second dielectric material. The first dielectric material surrounds the second dielectric material.
申请公布号 US2004046259(A1) 申请公布日期 2004.03.11
申请号 US20030659068 申请日期 2003.09.08
申请人 CHOW LOREN A. 发明人 CHOW LOREN A.
分类号 H01L21/318;H01L21/768;H01L23/532;(IPC1-7):H01L23/48;H01L23/52;H01L29/40 主分类号 H01L21/318
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