发明名称 |
IMPROVEMENTS TO OXIDE FILMS |
摘要 |
An oxide film having improved fatigue-switching characteristics suitable for use in non-volatile electronic memories has the composition: - (Pb1+delta(Zr1-XtiX)1-Z MnZ03) (where 0.06 Ü x Ü 1, 0 < z < 0.2, 0 Üdelta< 0.2) The film is produced using a solution of manganese doped lead zirconate titanate obtained by dissolving precursors in a hybrid solvent including methanol, ethanol and acetic acid without removing water during synthesis. The resulting solution is resistant to hydrolysis and may be deposited on a substrate by spin or dip coating, dried and fired to develop an oxide film having a perovskite microcrystalline structure. |
申请公布号 |
WO2004020682(A2) |
申请公布日期 |
2004.03.11 |
申请号 |
WO2003GB03774 |
申请日期 |
2003.08.29 |
申请人 |
CRANFIELD UNIVERSITY;ZHANG, QI;WHATMORE, ROGER, WILLIAM |
发明人 |
ZHANG, QI;WHATMORE, ROGER, WILLIAM |
分类号 |
C04B35/491;C04B35/624;C23C18/12;H01L21/316 |
主分类号 |
C04B35/491 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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