MANUFACTURING METHOD OF THIN FILM SHAPE LIGHT EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a light emitting element in which a zinc oxide thin film with high brightness and high light emitting efficiency is formed and in which weight reduction and color purity are improved, without necessity of heating treatment at high temperatures. SOLUTION: After a precursor film consisting of zinc oxide particulates is formed on the substrate at a temperaturer 100°C or lower, at the substrate temperature equal to or lower than 100°C, an active beam having a higher energy than a band gap of this zinc oxide particulates and having an energy density within a range of 5 to 500 mJ/cm2is irradiated until obtained zinc oxide thin film generates bluish green color light emission by electron beam or ultraviolet irradiation, thereby a thin film shape light-emitting element is manufactured. COPYRIGHT: (C)2004,JPO