| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To correct a pattern according to the designed value of the pattern and to decrease a calculation time necessary for calculating the correction value of the pattern. <P>SOLUTION: The method is characterized in that the correction value is set on the basis of the width of a line of the pattern to be corrected, the distance between a pattern which is adjacent to the pattern to be corrected in width direction and the pattern to be corrected, and an edge distance between the edge to be corrected composing the pattern to be corrected and the edge which is in the remote side of an adjacent pattern which is adjacent in the edge direction opposite to the edge to be corrected. A correction value is set by referring to the distance between edges as a parameter, the correction of pattern is performed in which the influence of the pattern formed around the pattern to be corrected is taken into consideration. <P>COPYRIGHT: (C)2004,JPO</p> |
