PATTERN SHAPING DEVICE, PATTERN FORMING DEVICE AND PATTERN FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pattern forming device forming a pattern of a high accuracy in a top face and side face shapes on a substrate. SOLUTION: The pattern forming device 1 is provided with a delivery part 42 delivering a pattern-forming material toward the substrate 9, a curing part 43 curing the delivered pattern-forming material and a roller 53 having a plurality of concave parts, which structure moves relatively to the substrate 9 on a stage 3 by a stage movement mechanism. The concave parts of the roller 53 are formed at a position corresponding to a delivery outlet of the discharging part 42. The pattern-forming material delivered from the delivery part 42 is made a semi-cured state by the curing part 43, and then, a part of the top face and the side faces are shaped to form a partitioning pattern with a high accuracy in shape of the top face and the side faces. COPYRIGHT: (C)2004,JPO