TRANSPARENT CONDUCTIVE FILM AND ITS PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a zinc oxide-indium oxide transparent conductive film which is excellent in surface smoothness and low resistance properties and comprises an amorphous homologous compound represented by ZnkIn2Ok+3(wherein k is an integer of 1-4), and to provide its production method. SOLUTION: The transparent conductive film, having a surface unevenness of 10 nm or lower and comprising an amorphous homologous compound, is produced by heating a thin film consisting of an amorphous homologous compound represented by ZnkIn2Ok+3(wherein k is an integer of 1-4) at 250-500°C in an inert gas atmosphere or in a reducing atmosphere. COPYRIGHT: (C)2004,JPO