发明名称 |
Method for producing trichlorosilane |
摘要 |
The invention relates to a method for producing trichlorosilane by reacting silicon with silicon tetrachloride and hydrogen while adding hydrogen chloride, the residence time of the hydrogen chloride in the reaction chamber being less than the residence time of the silicon tetrachloride.
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申请公布号 |
US2004047793(A1) |
申请公布日期 |
2004.03.11 |
申请号 |
US20030450457 |
申请日期 |
2003.10.15 |
申请人 |
MLECZKO LESLAW;BUCHOLZ SIGURD;SILL TORSTEN;BECKER FRANK |
发明人 |
MLECZKO LESLAW;BUCHOLZ SIGURD;SILL TORSTEN;BECKER FRANK |
分类号 |
C01B33/027;C01B33/04;C01B33/107;(IPC1-7):C01B33/107 |
主分类号 |
C01B33/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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