ALUMINUM NITRIDE SINTERED COMPACT, METALIZED SUBSTRATES, HEATER, FIXTURE AND METHOD OF MANUFACTURING ALUMINUM NITRIDE SINTERED COMPACT

摘要

PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact having a larger surface area and smaller thickness compared to the corresponding sintered compact of the prior art and further having flatness with controlled warpage or waviness, a method of manufacturing the aluminum nitride sintered compact, a metalized substrate and a heater using the aluminum nitride sintered compact.

SOLUTION: The aluminum nitride substrate 1 has ≥320 mm maximum length ML, <0 mm to ≤2 mm thickness, ≥0 μm/mm to <2 μm/mm warpage and ≥0 μm to ≤100 μm height of local waviness.

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