VACUUM FILM-FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vacuum film-forming device capable of detecting whether or not an adhesion prevention plate and a vacuum chamber communicate electrically even during film formation. SOLUTION: In the vacuum film-forming device, a conductive wire 11 is laid through a feed through 15 provided at the inside and outside of the vacuum chamber 2 while passing through a side wall of the vacuum chamber 2. The conductive wire 11 is branched into plural at the inside of the vacuum chamber 2 and the end part of each branch destination is connected to respective hook rail 9 and stand 10. The end part of the conductive wire 11 at the outside of the vacuum chamber 2 is connected to a detecting part 16. COPYRIGHT: (C)2004,JPO