| 摘要 |
PROBLEM TO BE SOLVED: To provide an etchant which can be practically used in forming a pattern, such as of wiring, on a thin silver alloy film with a gold content of 10 atom% or lower. SOLUTION: The etchant is an aqueous solution containing at least one inorganic acid selected from among phosphoric acid, sulfuric acid, and nitric acid, an oxidant containing at least one chemical species corresponding to an electrode reaction with a standard electrode potential of +0.75V or higher, and a surfactant having a plurality of structures of an aromatic sulfonic acid or aromatic sulfonic acid salt in the molecule. COPYRIGHT: (C)2004,JPO
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