| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for atmospheric-pressure plasma treatment, which retains long-term durability of an ignition electrode, continues stable discharge, and inhibits condensation of a vapor on an electrode part, inhibits fouling of the discharge surface of the electrode, and forms film stably for a long time, and to provide a method for atmospheric-pressure plasma treatment. SOLUTION: The apparatus for atmospheric-pressure plasma treatment has the discharge surfaces of a first electrode and a second electrode which are arranged so as to face each other, and are composed so as not to directly contact with a reactive gas for forming a thin film. COPYRIGHT: (C)2004,JPO
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