| 摘要 |
PROBLEM TO BE SOLVED: To provide a converter usable even under circumstances where corrosive gases exist and reducing its manufacturing cost. SOLUTION: A pressure sensor 10 is equipped with an upper substrate 30 having a detection surface 30A, a diaphragm 20 provided on the detection surface of the upper substrate 30 with an air gap between, fixed electrodes 32 and 33 provided on the detection surface 30A of the substrate 30, and a first signal bring-out part 22 conducting to the diaphragm 20. The bring-out part 22 is formed of titanium having high corrosion resistance. The diaphragm 20 is formed by dry-etching monocrystal silicon whose resistivity is made 1.0Ωcm or under by incorporating therein resistance lowering elements. COPYRIGHT: (C)2004,JPO
|
