摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reliable vibration wave driver of low cost and high efficiency. <P>SOLUTION: A vibrating elastic body or a mobile body, constituting a vibration wave driver, is made from single stainless and is then nitrided. Thus, the junction part which causes vibration damping is eliminated, the number of components is decreased, and failures caused by peeling at the junction part are eliminated. Since a friction surface is provided by only forming a nitride film on a cut surface, even a surface which is difficult to be lapped can be made a friction surface. So, flexibility in the design of a vibration wave driver is increased. <P>COPYRIGHT: (C)2004,JPO |