PIEZO-ELECTRIC ELEMENT, INK JET HEAD, ANGULAR VELOCITY SENSORS AND THEIR MANUFACTURING METHOD, AND INK JET RECORDING DEVICE

摘要

PROBLEM TO BE SOLVED: To decrease variations in characteristic and to improve reliability of a piezoelectric element 20 by forming a piezoelectric substrate layer 3 comprising a perovskite type oxide excellent in crystallinity and a (001) face crystal orientation of the piezoelectric element 20.

SOLUTION: The manufacturing method comprises the steps of forming a first electrode layer 2 comprising an alloy of at least one type of metal selected from the group of cobalt, nickel, iron, manganese, and copper, and a noble metal, on a silicon wafer 1; forming a piezoelectric substrate layer 3 comprising rhombohedral system or tetragonal system perovskite type oxide (PZT, etc.) on the first electrdoe layer 2; and preferentially orienting the piezoelectric substrate layer 3 to the (001) face.

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