| 摘要 |
PROBLEM TO BE SOLVED: To provide a position detection means for reducing an error in measurement by fluctuations and turbulence in the air occurring when using light beams as the means of non-contact measurement, and for accurately detecting the misalignment between two points. SOLUTION: In the position detection means 10, light being illuminated from a light source 12 is scanned circularly toward a corner cube 22; a point where the quantity of reflected light is reduced at a ridgeline section 22A of the corner cube 22 is detected by a photoreception means 28; and the amount of deviation between the center O of a scan circle and the center 22C of the corner cube is calculated by a data processing means 32, thus obtaining the misalignment in an object. COPYRIGHT: (C)2004,JPO
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