| 摘要 |
PROBLEM TO BE SOLVED: To dissolve a conventional problem that an edge located in an adsorbing face side of a suction opening eats into and damages a ceramic green sheet; wherein a plurality of vacuum applicable suction openings is prepared in the adsorbing face of an adsorption head in order to peel the ceramic green sheet off a carrier film and hold it by adsorbing with the adsorption head, after the ceramic green sheet of a given dimension is cut out from a mother ceramic green sheet backed by the carrier film which is positioned on a cut table. SOLUTION: On handling a ceramic green sheet 6, the vacuum applied to suction openings 9 and 10 is diminished after the ceramic green sheet 6 is peeled off a carrier film 2, and the cut out ceramic green sheet 6 is held with an adsorption head 7 in that condition to prevent the edge of suction openings 9 and 10 from eating into the ceramic green sheet 6. COPYRIGHT: (C)2004,JPO
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